Paper • open access

 
 
References 
[1] Pecherskaya E A, Golubkov, P.E., Fimin A V, Zinchenko T O, Pechersky A V, Shepeleva J V 
2018 
Procedia Computer Science
 
132
1163 – 1170 
[2] Mishina E D, Muhortov V M, Sigov A S 2009 
Integrated ferroelectrics
106
(1) 1–10 
[3] Pronin I P, Kaptelov E Yu, Senkevich S V, Klimov V A, Zaitseva N A, Shaplygina T A, Pronin V 
P, Kukushkin S A 2010 
Physics of the Solid State
 
52
(1), 124–128 
[4] Sulei Fu, Qi Li, Shuang Gao, Guangyue Wang, Fei Zeng and Feng Pan 2017 
Applied Surface 
Science
402
392-399 
[5] Kukushkin S A, Osipov A V, Sergeeva O N, Kiselev D A, Bogomolov A A, Solnyshkin A V, 
Kaptelov E Yu, Senkevich S V, Pronin I P 2016 
Physics of the Solid State
58
(5) 967–970 
[6] Pronin I P, Kukushkin S A, Spirin V V at al. 2017 
Materials Physics and Mechanics
30
20-34 
[7] Pecherskaya E A., Zinchenko T O, Golubkov P E, Pechersky A V, Fimin A V, Nikolaev, K O 
2018 
Moscow Workshop on Electronic and Networking Technologies (MWENT)
, Moscow, pp. 1-4. 
[8] Pecherskaya E A, Ryabov D V, Shepeleva J V, Pecherskaya R M 2014 
Journal of Physics: 
Conference Series
541
012012
[9] MEMS Materialsand Processes HandbookSpringer Science+Business Media, LLC 2011 DOI: 
10.1007/978-0-387-47318-5
[10] Warren W L, Robertson J, Dimos D, Tuttle B A, Pike G E, Payne D A 1996 
Phys. Rev
.
B
53
, 
3080–3087 
[11] Vorotilov K A, Mukhortov V M, and Sigov A S 2011 
Integrated Ferroelectric Devices
(Energoatomizdat, Moscow) p 175. 
[12] Vorotilov K A, Sigov A S 2012 
Phys. Solid State
54
(5), 894 
[13] Volokhov I V, Gurin S A, Vergazov I R 2016 
Measurement Techniques
 
59
80–86