single cells and are used in neurophysiologic studies to comprehend the course of biological
information conversion and transmission in our body. The tip of these electrodes must be very
small with respect to the dimensions of the biological cell to avoid cell damage and at the same
time sufficiently strong to penetrate the cell wall. The electrode which is applied to microbe
studies is called microelectrodes. Generally, there are three types of microelectrodes: (1) glass
microelectrodes, (2) metal electrodes, and (3) solid-state microprobes.
For glass microelectrodes, when the tip of such electrodes is inserted into an electrolyte
solution, such as the intracellular cytoplasm of a biological cell, ionic current can flow through
the fluid junction at the tip of the microelectrode. Such mode could establish a closed electrical
circuit between two Ag/AgCl wire electrodes inside the microelectrode and biological cell. For
metal electrode, when the tip of such microelectrodes is usually sharpened down to a diameter
of a few micrometers by an electrochemical etching process. The wires are then insulated up
to its tip.
Solid-state microfabrication techniques commonly used in the production of the integrated
circuits can be used to produce microprobes for multichannel recordings of biopotentials or
for electrical stimulation of neurons in our brain or spinal cord. Most of solid-state micro‐
electrodes are microsensor actually. Such probe consists of a precisely micromachined silicon
substrate with four exposed recording sites. One of main advantages of microfabrication
techniques is the ability to mass produce very small and highly sophisticated microsensors
with highly reproducible electrical and physical properties.
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