Paper • open access

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Journal of Physics: Conference Series
PAPER • 
OPEN ACCESS
Sensitive elements of microelectronic sensors of
fast variable and static pressure
To cite this article: A. V. Fimin 
et al 2019 J. Phys.: Conf. Ser. 1410 012230
View the 
article online
for updates and enhancements.
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Published under licence by IOP Publishing Ltd
SPbOPEN 2019
Journal of Physics: Conference Series
1410 (2019) 012230
IOP Publishing
doi:10.1088/1742-6596/1410/1/012230
1
Sensitive elements of microelectronic sensors of fast variable 
and static pressure 
A. V. Fimin
1
, S. A. Gurin
2
, E. A. Peсherskaya
1
, P. E. Golubkov
1
,
G. V. Kozlov
1
, K. Y. Kraynova
1
 
1
Department of Information and measuring equipment and metrology, Penza State 
University, Penza 440026, Russia 
2
CJSC Medtechnika, Penza 440018, Russia 
Abstract.
The technical progress development contributes to the introduction of automated 
methods of management and control of the system state. The use of sensor equipment with the 
use of piezoelectric tensor-resistive modules allows to register fast variable and statistical 
pressure, respectively. Such assemblies possess not only the most reliable information content 
of the measured values, but also combine simple step-by-step manufacturing techniques.